Inventor
WIHL MARK J
US13 patents
⚠️ This page may combine multiple inventors who share the name “WIHL MARK J”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
KLA INSTR CORP
8 patentsUS5572598ANov 5, 1996
Automated photomask inspection apparatus
KLA INSTR CORP294 citations99
US5563702AOct 8, 1996
Automated photomask inspection apparatus and method
KLA INSTR CORP386 citations98
US4633504ADec 30, 1986
Automatic photomask inspection system having image enhancement means
KLA INSTR CORP154 citations97
US4532650AJul 30, 1985
Photomask inspection apparatus and method using corner comparator defect detection algorithm
KLA INSTR CORP254 citations97
US5737072AApr 7, 1998
Automated photomask inspection apparatus and method
KLA INSTR CORP221 citations96
US4926489AMay 15, 1990
Reticle inspection system
KLA INSTR CORP311 citations94
US4579455AApr 1, 1986
Photomask inspection apparatus and method with improved defect detection
KLA INSTR CORP280 citations94
US4555798ANov 26, 1985
Automatic system and method for inspecting hole quality
KLA INSTR CORP180 citations94
KLA TENCOR CORP
3 patentsUS7873204B2Jan 18, 2011
Method for detecting lithographically significant defects on reticles
KLA TENCOR CORP56 citations97
US9892503B2Feb 13, 2018
Monitoring changes in photomask defectivity
KLA TENCOR CORP4 citations69
US9518935B2Dec 13, 2016
Monitoring changes in photomask defectivity
KLA TENCOR CORP3 citations69