Inventor
MATSUKI KAZUTO
JP11 patents
⚠️ This page may combine multiple inventors who share the name “MATSUKI KAZUTO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOSHIBA KK
7 patentsUS6313476B1Nov 6, 2001
Charged beam lithography system
TOSHIBA KK56 citations95
US5760410AJun 2, 1998
Electron beam lithography apparatus and method
TOSHIBA KK22 citations92
US5912468AJun 15, 1999
Charged particle beam exposure system
TOSHIBA KK22 citations91
US5894057AApr 13, 1999
Charged beam drawing method
TOSHIBA KK17 citations83
US6182369B1Feb 6, 2001
Pattern forming apparatus
TOSHIBA KK10 citations73
US6319642B1Nov 20, 2001
Electron beam exposure apparatus
TOSHIBA KK13 citations72
US7359043B2Apr 15, 2008
Pattern inspecting method and pattern inspecting apparatus
TOSHIBA KK4 citations60