Inventor
KABANSKY ALEX
US7 patents
⚠️ This page may combine multiple inventors who share the name “KABANSKY ALEX”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
LSI LOGIC CORP
4 patentsUS6461972B1Oct 8, 2002
Integrated circuit fabrication dual plasma process with separate introduction of different gases into gas flow
LSI LOGIC CORP50 citations94
US6346490B1Feb 12, 2002
Process for treating damaged surfaces of low k carbon doped silicon oxide dielectric material after plasma etching and plasma cleaning steps
LSI LOGIC CORP53 citations92
US6641698B2Nov 4, 2003
Integrated circuit fabrication dual plasma process with separate introduction of different gases into gas flow
LSI LOGIC CORP34 citations90
US6346488B1Feb 12, 2002
Process to provide enhanced resistance to cracking and to further reduce the dielectric constant of a low dielectric constant dielectric film of an integrated circuit structure by implantation with hydrogen ions
LSI LOGIC CORP30 citations90