Inventor
UMISEDO SEI
JP4 patents
Patents
4 patentsUS7365339B2Apr 29, 2008
Ion source
NISSIN ION EQUIPMENT CO LTD8 citations71
US7655929B2Feb 2, 2010
Ion beam measuring method and ion implanting apparatus
NISSIN ION EQUIPMENT CO LTD2 citations60
US7368734B2May 6, 2008
Ion beam measuring method and ion implanting apparatus
NISSIN ION EQUIPMENT CO LTD3 citations58
US7750313B2Jul 6, 2010
Ion source
NISSIN ION EQUIPMENT CO LTD0 citations39