Inventor
KITAJIMA TOSHIKAZU
JP5 patents
Patents
5 patentsUS6915232B2Jul 5, 2005
Film thickness measuring method, relative dielectric constant measuring method, film thickness measuring apparatus, and relative dielectric constant measuring apparatus
DAINIPPON SCREEN MFG7 citations69
US7795886B2Sep 14, 2010
Surface voltmeter
DAINIPPON SCREEN MFG2 citations60
US7375537B2May 20, 2008
Method and apparatus for measuring relative dielectric constant
DAINIPPON SCREEN MFG0 citations48
US7427520B2Sep 23, 2008
Method and apparatus for measuring thickness of thin film formed on substrate
DAINIPPON SCREEN MFG0 citations38
US7488610B2Feb 10, 2009
Insulator film characteristic measuring method and insulator film characteristic measuring apparatus
DAINIPPON SCREEN MFG0 citations35