Inventor
KONO MOTOHIRO
JP11 patents
⚠️ This page may combine multiple inventors who share the name “KONO MOTOHIRO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
DAINIPPON SCREEN MFG
8 patentsUS4746857AMay 24, 1988
Probing apparatus for measuring electrical characteristics of semiconductor device formed on wafer
DAINIPPON SCREEN MFG108 citations95
US6037781AMar 14, 2000
Measurement of electrical characteristics of semiconductor wafer
DAINIPPON SCREEN MFG12 citations73
US6915232B2Jul 5, 2005
Film thickness measuring method, relative dielectric constant measuring method, film thickness measuring apparatus, and relative dielectric constant measuring apparatus
DAINIPPON SCREEN MFG7 citations69
US6278267B1Aug 21, 2001
Method of determining impurity content and apparatus for the same
DAINIPPON SCREEN MFG3 citations62
US7598746B2Oct 6, 2009
Surface voltmeter and surface voltage measurement method
DAINIPPON SCREEN MFG2 citations61
US7795886B2Sep 14, 2010
Surface voltmeter
DAINIPPON SCREEN MFG2 citations60
US7375537B2May 20, 2008
Method and apparatus for measuring relative dielectric constant
DAINIPPON SCREEN MFG0 citations48
US7427520B2Sep 23, 2008
Method and apparatus for measuring thickness of thin film formed on substrate
DAINIPPON SCREEN MFG0 citations38
SCREEN HOLDINGS CO LTD
3 patentsUS9766132B2Sep 19, 2017
Measuring apparatus and measuring method
SCREEN HOLDINGS CO LTD2 citations72
US11986867B2May 21, 2024
Substrate processing method and substrate processing apparatus
SCREEN HOLDINGS CO LTD1 citations60
US11267729B2Mar 8, 2022
In-liquid plasma generation device and liquid treatment apparatus
SCREEN HOLDINGS CO LTD0 citations59