Inventor
KOH CHAWON
KR9 patents
⚠️ This page may combine multiple inventors who share the name “KOH CHAWON”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SAMSUNG ELECTRONICS CO LTD
8 patentsUS11327398B2May 10, 2022
Photoresist compositions and methods for fabricating semiconductor devices using the same
SAMSUNG ELECTRONICS CO LTD2 citations68
US11599021B2Mar 7, 2023
Photoresist compositions and methods for fabricating semiconductor devices using the same
SAMSUNG ELECTRONICS CO LTD0 citations57
US10353290B2Jul 16, 2019
Photoresist composition for extreme ultraviolet and method of forming photoresist pattern using the same
SAMSUNG ELECTRONICS CO LTD1 citations56
US12360451B2Jul 15, 2025
Method of manufacturing semiconductor device
SAMSUNG ELECTRONICS CO LTD0 citations54
US11189503B2Nov 30, 2021
Substrate drying method, photoresist developing method, photolithography method including the same, and substrate drying system
SAMSUNG ELECTRONICS CO LTD0 citations51
US9158204B2Oct 13, 2015
Photo lithographic rinse solution and method of manufacturing a semiconductor device using the same
SAMSUNG ELECTRONICS CO LTD0 citations50
US11923209B2Mar 5, 2024
Substrate processing apparatus and substrate processing method
SAMSUNG ELECTRONICS CO LTD0 citations45
US12112948B2Oct 8, 2024
Method of manufacturing integrated circuit device using a metal-containing photoresist composition
SAMSUNG ELECTRONICS CO LTD0 citations43