Inventor

SUGANUMA MIZUNA

JP4 patents

Patents

4 patents

US9224578B2Dec 29, 2015

Charged particle beam writing apparatus and method for acquiring dose modulation coefficient of charged particle beam

NUFLARE TECHNOLOGY INC6 citations71

US9852885B2Dec 26, 2017

Charged particle beam writing method, and charged particle beam writing apparatus

NUFLARE TECHNOLOGY INC2 citations69

US9484185B2Nov 1, 2016

Charged particle beam writing apparatus, and charged particle beam writing method

NUFLARE TECHNOLOGY INC2 citations60

US10032603B2Jul 24, 2018

Charged particle beam lithography apparatus and charged particle beam lithography method

NUFLARE TECHNOLOGY INC0 citations38