Inventor
EBEFORS THORBJORN
SE11 patents
⚠️ This page may combine multiple inventors who share the name “EBEFORS THORBJORN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SILEX MICROSYSTEMS AB
6 patentsUS9718674B2Aug 1, 2017
Thin capping for MEMS devices
SILEX MICROSYSTEMS AB3 citations70
US9620390B2Apr 11, 2017
Method of making a semiconductor device having a functional capping
SILEX MICROSYSTEMS AB2 citations69
US9514985B2Dec 6, 2016
Electroless metal through silicon via
SILEX MICROSYSTEMS AB4 citations66
US9448401B2Sep 20, 2016
Via structure and method thereof
SILEX MICROSYSTEMS AB0 citations48
US9613863B2Apr 4, 2017
Method for forming electroless metal through via
SILEX MICROSYSTEMS AB0 citations45
US9511999B2Dec 6, 2016
Thin film capping
SILEX MICROSYSTEMS AB0 citations39
EBEFORS THORBJORN
4 patentsUS8485416B2Jul 16, 2013
Bonding process and bonded structures
EBEFORS THORBJORN8 citations79
US9224681B2Dec 29, 2015
CTE matched interposer and method of making
EBEFORS THORBJORN5 citations68
US8866289B2Oct 21, 2014
Bonding process and bonded structures
EBEFORS THORBJORN1 citations58
US9355895B2May 31, 2016
Method of providing a via hole and routing structure
EBEFORS THORBJORN2 citations57