Inventor

ONODERA SHINOBU

JP3 patents

⚠️ This page may combine multiple inventors who share the name “ONODERA SHINOBU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TOKYO ELECTRON LTD

2 patents

US9305817B2Apr 5, 2016

Method for purging a substrate container

TOKYO ELECTRON LTD13 citations78

US10859426B2Dec 8, 2020

Method of inspecting flow rate measuring system

TOKYO ELECTRON LTD0 citations39

ONODERA SHINOBU

1 patent

US8731698B2May 20, 2014

Substrate receiving method and controller

ONODERA SHINOBU5 citations63