Inventor
CHIU WEN-LI
TW4 patents
Patents
4 patentsUS10128156B1Nov 13, 2018
FinFET device with reduced parasitic capacitance and method for fabricating the same
TAIWAN SEMICONDUCTOR MFG CO LTD8 citations82
US11101385B2Aug 24, 2021
Fin field effect transistor (FinFET) device structure with air gap and method for forming the same
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US11049775B2Jun 29, 2021
Semiconductor device having FinFET with work function layers and method of manufacturing the same
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations59
US10529861B2Jan 7, 2020
FinFET structures and methods of forming the same
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations51