Inventor
SHIN SEUNGMIN
KR6 patents
⚠️ This page may combine multiple inventors who share the name “SHIN SEUNGMIN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SAMSUNG ELECTRONICS CO LTD
5 patentsUS12278133B2Apr 15, 2025
Substrate transferring unit, substrate processing apparatus, and substrate processing method
SAMSUNG ELECTRONICS CO LTD0 citations60
US11881426B2Jan 23, 2024
Substrate transferring unit, substrate processing apparatus, and substrate processing method
SAMSUNG ELECTRONICS CO LTD0 citations60
US11798801B2Oct 24, 2023
Apparatus including light source supplying light to wafer and window protector receiving a portion of chemical liquid
SAMSUNG ELECTRONICS CO LTD0 citations58
US11482410B2Oct 25, 2022
Apparatus including light source supplying light to wafer and window protector receiving a portion of chemical liquid
SAMSUNG ELECTRONICS CO LTD0 citations58
US12578647B2Mar 17, 2026
Substrate rotating apparatus, substrate processing system including the same, and substrate processing method using the same
SAMSUNG ELECTRONICS CO LTD0 citations50