Inventor
CHEN XUEMEI
US15 patents
⚠️ This page may combine multiple inventors who share the name “CHEN XUEMEI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
CHEN XUEMEI
2 patentsKLA CORP
2 patentsUS11460783B2Oct 4, 2022
System and method for focus control in extreme ultraviolet lithography systems using a focus-sensitive metrology target
KLA CORP2 citations71
US12153352B2Nov 26, 2024
System and method for focus control in extreme ultraviolet lithography systems using a focus-sensitive metrology target
KLA CORP0 citations61