Inventor
HSU CHIAO-CHUN
TW8 patents
Patents
8 patentsUS11869761B2Jan 9, 2024
Back-side deep trench isolation structure for image sensor
TAIWAN SEMICONDUCTOR MFG CO LTD3 citations74
US11387748B2Jul 12, 2022
Self-aligned dielectric liner structure for protection in MEMS comb actuator
TAIWAN SEMICONDUCTOR MFG CO LTD4 citations71
US11814731B2Nov 14, 2023
Semiconductor tool having controllable ambient environment processing zones
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations70
US11832520B2Nov 28, 2023
Voltage breakdown uniformity in piezoelectric structure for piezoelectric devices
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations61
US12398468B2Aug 26, 2025
Semiconductor tool having controllable ambient environment processing zones
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations59
US11047050B2Jun 29, 2021
Semiconductor tool having controllable ambient environment processing zones
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations59
US12355370B2Jul 8, 2025
Self-aligned dielectric liner structure for protection in MEMS comb actuator
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations50
US12254262B2Mar 18, 2025
Calibration method for emulating group III-V semiconductor device and method for manufacturing group III-V semiconductor device
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations45