Inventor
BRIGHT NICOLAS
US14 patents
⚠️ This page may combine multiple inventors who share the name “BRIGHT NICOLAS”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
LAM RES CORP
12 patentsUS6322661B1Nov 27, 2001
Method and apparatus for controlling the volume of a plasma
LAM RES CORP75 citations96
US6929531B2Aug 16, 2005
System and method for metal residue detection and mapping within a multi-step sequence
LAM RES CORP23 citations92
US7521358B2Apr 21, 2009
Process integration scheme to lower overall dielectric constant in BEoL interconnect structures
LAM RES CORP11 citations84
US7465525B2Dec 16, 2008
Reticle alignment and overlay for multiple reticle process
LAM RES CORP8 citations73
US7152011B2Dec 19, 2006
Smart component-based management techniques in a substrate processing system
LAM RES CORP9 citations73
US6984162B2Jan 10, 2006
Apparatus methods for controlling wafer temperature in chemical mechanical polishing
LAM RES CORP7 citations73
US6736720B2May 18, 2004
Apparatus and methods for controlling wafer temperature in chemical mechanical polishing
LAM RES CORP6 citations73
US7539969B2May 26, 2009
Computer readable mask shrink control processor
LAM RES CORP4 citations62
US7029368B2Apr 18, 2006
Apparatus for controlling wafer temperature in chemical mechanical polishing
LAM RES CORP3 citations62
US7899627B2Mar 1, 2011
Automatic dynamic baseline creation and adjustment
LAM RES CORP3 citations60
US7254510B2Aug 7, 2007
Smart component-based management techniques in a substrate processing system
LAM RES CORP0 citations51
US7542820B2Jun 2, 2009
Methods and arrangement for creating recipes using best-known methods
LAM RES CORP0 citations40