Inventor
KOMATSU KOUICHIRO
JP7 patents
Patents
7 patentsUS5489986AFeb 6, 1996
Position detecting apparatus
NIKON CORP119 citations97
US5347356ASep 13, 1994
Substrate aligning device using interference light generated by two beams irradiating diffraction grating
NIKON CORP71 citations96
US5151750ASep 29, 1992
Alignment apparatus
NIKON CORP88 citations96
US5118953AJun 2, 1992
Substrate alignment apparatus using diffracted and reflected radiation beams
NIKON CORP54 citations96
US5568257AOct 22, 1996
Adjusting device for an alignment apparatus
NIKON CORP24 citations92
US5483348AJan 9, 1996
Apparatus for optically detecting a position of a mark
NIKON CORP22 citations92
US5572325ANov 5, 1996
Apparatus for optically detecting a position of mark
NIKON CORP3 citations62