Inventor

TELFORD SUSAN

US7 patents

Patents

7 patents

US5326725AJul 5, 1994

Clamping ring and susceptor therefor

APPLIED MATERIALS INC166 citations98

US5817576AOct 6, 1998

Utilization of SiH4 soak and purge in deposition processes

APPLIED MATERIALS INC86 citations94

US5510297AApr 23, 1996

Process for uniform deposition of tungsten silicide on semiconductor wafers by treatment of susceptor having aluminum nitride surface thereon with tungsten silicide after cleaning of susceptor

APPLIED MATERIALS INC22 citations92

US5482749AJan 9, 1996

Pretreatment process for treating aluminum-bearing surfaces of deposition chamber prior to deposition of tungsten silicide coating on substrate therein

APPLIED MATERIALS INC28 citations92

US5565382AOct 15, 1996

Process for forming tungsten silicide on semiconductor wafer using dichlorosilane gas

APPLIED MATERIALS INC33 citations91

US5780360AJul 14, 1998

Purge in silicide deposition processes dichlorosilane

APPLIED MATERIALS INC9 citations72

US6193813B1Feb 27, 2001

Utilization of SiH4 soak and purge in deposition processes

APPLIED MATERIALS INC3 citations61