Inventor
FISHKIN BORIS
US39 patents
⚠️ This page may combine multiple inventors who share the name “FISHKIN BORIS”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
38 patentsUS5884640AMar 23, 1999
Method and apparatus for drying substrates
APPLIED MATERIALS INC535 citations98
US6311702B1Nov 6, 2001
Megasonic cleaner
APPLIED MATERIALS INC75 citations96
US6202658B1Mar 20, 2001
Method and apparatus for cleaning the edge of a thin disc
APPLIED MATERIALS INC66 citations96
US6082948AJul 4, 2000
Controlled environment enclosure and mechanical interface
APPLIED MATERIALS INC76 citations96
US6027574AFeb 22, 2000
Method of drying a substrate by lowering a fluid surface level
APPLIED MATERIALS INC43 citations96
US5697750ADec 16, 1997
Controlled environment enclosure and mechanical interface
APPLIED MATERIALS INC50 citations96
US6328814B1Dec 11, 2001
Apparatus for cleaning and drying substrates
APPLIED MATERIALS INC60 citations95
US6139406AOct 31, 2000
Combined slurry dispenser and rinse arm and method of operation
APPLIED MATERIALS INC103 citations95
US6280299B1Aug 28, 2001
Combined slurry dispenser and rinse arm
APPLIED MATERIALS INC54 citations94
US6352403B1Mar 5, 2002
Controlled environment enclosure and mechanical interface
APPLIED MATERIALS INC26 citations93
US6345630B2Feb 12, 2002
Method and apparatus for cleaning the edge of a thin disc
APPLIED MATERIALS INC43 citations93
US6241588B1Jun 5, 2001
Cavitational polishing pad conditioner
APPLIED MATERIALS INC15 citations93
US6220259B1Apr 24, 2001
Tank design for sonic wafer cleaning
APPLIED MATERIALS INC32 citations93
US6148833ANov 21, 2000
Continuous cleaning megasonic tank with reduced duty cycle transducers
APPLIED MATERIALS INC27 citations93
US6119708ASep 19, 2000
Method and apparatus for cleaning the edge of a thin disc
APPLIED MATERIALS INC26 citations93
US5957754ASep 28, 1999
Cavitational polishing pad conditioner
APPLIED MATERIALS INC18 citations93
US6464799B1Oct 15, 2002
Method for managing a fluid level associated with a substrate processing tank
APPLIED MATERIALS INC30 citations92
US6220941B1Apr 24, 2001
Method of post CMP defect stability improvement
APPLIED MATERIALS INC35 citations92
US5047648ASep 10, 1991
Method and apparatus for detecting particles in ion implantation machines
APPLIED MATERIALS INC41 citations92
US7718011B2May 18, 2010
Apparatus for cleaning and drying substrates
APPLIED MATERIALS INC17 citations91
US7513062B2Apr 7, 2009
Single wafer dryer and drying methods
APPLIED MATERIALS INC23 citations91
US7252098B2Aug 7, 2007
Apparatus for cleaning and drying substrates
APPLIED MATERIALS INC26 citations91
US6955516B2Oct 18, 2005
Single wafer dryer and drying methods
APPLIED MATERIALS INC33 citations91
US6746544B2Jun 8, 2004
Apparatus for cleaning and drying substrates
APPLIED MATERIALS INC32 citations91
US6217430B1Apr 17, 2001
Pad conditioner cleaning apparatus
APPLIED MATERIALS INC21 citations91
US6468362B1Oct 22, 2002
Method and apparatus for cleaning/drying hydrophobic wafers
APPLIED MATERIALS INC38 citations90
US6218306B1Apr 17, 2001
Method of chemical mechanical polishing a metal layer
APPLIED MATERIALS INC31 citations90
US5083865AJan 28, 1992
Particle monitor system and method
APPLIED MATERIALS INC44 citations90
US6358124B1Mar 19, 2002
Pad conditioner cleaning apparatus
APPLIED MATERIALS INC44 citations88
US6460551B1Oct 8, 2002
Megasonic resonator for disk cleaning and method for use thereof
APPLIED MATERIALS INC16 citations84
US7980255B2Jul 19, 2011
Single wafer dryer and drying methods
APPLIED MATERIALS INC10 citations81
US5565985AOct 15, 1996
Particle monitoring sensor
APPLIED MATERIALS INC18 citations81
US5463460AOct 31, 1995
Particle monitoring sensor
APPLIED MATERIALS INC14 citations81
US6412499B1Jul 2, 2002
Continuous cleaning megasonic tank with reduced duty cycle transducers
APPLIED MATERIALS INC9 citations74
US6276371B1Aug 21, 2001
Method and apparatus for cleaning the edge of a thin disc
APPLIED MATERIALS INC6 citations74
US6149505ANov 21, 2000
Cavitational polishing pad conditioner
APPLIED MATERIALS INC11 citations74
US6011622AJan 4, 2000
Particle monitoring system
APPLIED MATERIALS INC12 citations72
US5287725AFeb 22, 1994
Surface volatile material detector
APPLIED MATERIALS INC11 citations69