Inventor
OWYANG JON S
US6 patents
⚠️ This page may combine multiple inventors who share the name “OWYANG JON S”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
LSI LOGIC CORP
5 patentsUS5893952AApr 13, 1999
Apparatus for rapid thermal processing of a wafer
LSI LOGIC CORP38 citations95
US5818100AOct 6, 1998
Product resulting from selective deposition of polysilicon over single crystal silicon substrate
LSI LOGIC CORP43 citations95
US5646073AJul 8, 1997
Process for selective deposition of polysilicon over single crystal silicon substrate and resulting product
LSI LOGIC CORP54 citations95
US5897381AApr 27, 1999
Method of forming a layer and semiconductor substrate
LSI LOGIC CORP30 citations92
US5756369AMay 26, 1998
Rapid thermal processing using a narrowband infrared source and feedback
LSI LOGIC CORP15 citations81