Inventor
TSUKADA AKIHIKO
JP5 patents
⚠️ This page may combine multiple inventors who share the name “TSUKADA AKIHIKO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
4 patentsUS6319327B1Nov 20, 2001
MOCVD system
TOKYO ELECTRON LTD22 citations89
US5951282ASep 14, 1999
Vertical heat treatment apparatus
TOKYO ELECTRON LTD17 citations82
US6042372AMar 28, 2000
Heat treatment apparatus
TOKYO ELECTRON LTD15 citations72
US7367350B2May 6, 2008
Processing device and method of maintaining the device
TOKYO ELECTRON LTD5 citations60