Inventor
SHIMOMURA KOUJI
JP6 patents
⚠️ This page may combine multiple inventors who share the name “SHIMOMURA KOUJI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
4 patentsUS6319327B1Nov 20, 2001
MOCVD system
TOKYO ELECTRON LTD22 citations89
US7367350B2May 6, 2008
Processing device and method of maintaining the device
TOKYO ELECTRON LTD5 citations60
US7754620B2Jul 13, 2010
Film formation method and recording medium
TOKYO ELECTRON LTD0 citations48
US7858509B2Dec 28, 2010
High-dielectric film substrate processing method
TOKYO ELECTRON LTD0 citations46