Inventor
XIE JOSEPH ZHIFENG
SG5 patents
⚠️ This page may combine multiple inventors who share the name “XIE JOSEPH ZHIFENG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
CHARTERED SEMICONDUCTOR MFG
4 patentsUS6424044B1Jul 23, 2002
Use of boron carbide as an etch-stop and barrier layer for copper dual damascene metallization
CHARTERED SEMICONDUCTOR MFG99 citations96
US6352921B1Mar 5, 2002
Use of boron carbide as an etch-stop and barrier layer for copper dual damascene metallization
CHARTERED SEMICONDUCTOR MFG64 citations95
US6730591B2May 4, 2004
Method of using silicon rich carbide as a barrier material for fluorinated materials
CHARTERED SEMICONDUCTOR MFG6 citations71
US6429129B1Aug 6, 2002
Method of using silicon rich carbide as a barrier material for fluorinated materials
CHARTERED SEMICONDUCTOR MFG11 citations71