Inventor
MARKS ERNEST E
US7 patents
Patents
7 patentsUS5312139AMay 17, 1994
Fluid line nut locking device
MICRON TECHNOLOGY INC41 citations91
US5222768AJun 29, 1993
Fluid line nut locking device
MICRON TECHNOLOGY INC32 citations90
US5000208AMar 19, 1991
Wafer rinser/dryer
MICRON TECHNOLOGY INC45 citations88
US5299842AApr 5, 1994
Fluid line clamp
MICRON TECHNOLOGY INC13 citations71
US5261776ANov 16, 1993
Vacuum operated wafer transfer apparatus
MICRON TECHNOLOGY INC16 citations70
US4872356AOct 10, 1989
Resistivity probe fixture
MICRON TECHNOLOGY INC13 citations68
US5100287AMar 31, 1992
Method of transferring wafers using vacuum
MICRON TECHNOLOGY INC4 citations59