Inventor

CASTENMILLER THOMAS JOSEPHUS M

NL3 patents

⚠️ This page may combine multiple inventors who share the name “CASTENMILLER THOMAS JOSEPHUS M”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ASML NETHERLANDS BV

2 patents

US7012672B2Mar 14, 2006

Lithographic apparatus, system, method, computer program, and apparatus for height map analysis

ASML NETHERLANDS BV20 citations84

US6856376B2Feb 15, 2005

Lithographic apparatus, apparatus cleaning method, device manufacturing method and device manufactured thereby

ASML NETHERLANDS BV7 citations71

ASM LITHOGRAPHY BV

1 patent

US6563564B2May 13, 2003

Method of operating an optical imaging system, lithographic projection apparatus, device manufacturing method, and device manufactured thereby

ASM LITHOGRAPHY BV58 citations90