Inventor

CAMPBELL RANDAL L

US2 patents

Patents

2 patents

US6620574B2Sep 16, 2003

Method of treating photoresists using electrodeless UV lamps

PPG IND OHIO INC2 citations57

US7090958B2Aug 15, 2006

Positive photoresist compositions having enhanced processing time

PPG IND OHIO INC1 citations49