Inventor
YU FU-YANG
TW10 patents
Patents
10 patentsUS6120366ASep 19, 2000
Chemical-mechanical polishing pad
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Gas tube with heating apparatus
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US6648729B2Nov 18, 2003
Wafer pressure regulation system for polishing machine
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US6352244B2Mar 5, 2002
Auxiliary gasline-heating unit in chemical vapor deposition
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US6322057B1Nov 27, 2001
Auxiliary gasline-heating unit in chemical vapor deposition
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US6307163B1Oct 23, 2001
Chemical mixer tank calibrator and calibrating method for the same
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US5604152AFeb 18, 1997
CVD process for deposition of amorphous silicon
UNITED MICROELECTRONICS CORP5 citations62
US6228420B1May 8, 2001
Method to maintain consistent thickness of thin film deposited by chemical vapor deposition
UNITED MICROELECTRONICS CORP6 citations61
US6165255ADec 26, 2000
Chemical-liquid controlling apparatus
UNITED MICROELECTRONICS CORP2 citations61
US6676801B2Jan 13, 2004
Pressure suppression device for chemical mechanical polishing machine and method thereof
UNITED MICROELECTRONICS CORP1 citations50