Inventor
SASAKI KAZUHITO
JP8 patents
⚠️ This page may combine multiple inventors who share the name “SASAKI KAZUHITO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO OHKA KOGYO CO LTD
4 patentsUS6749989B2Jun 15, 2004
Positive-working photoresist composition
TOKYO OHKA KOGYO CO LTD16 citations84
US7544460B2Jun 9, 2009
Resist composition, multilayer body, and method for forming resist pattern
TOKYO OHKA KOGYO CO LTD4 citations62
US7598017B2Oct 6, 2009
Negative resist composition and method of forming resist pattern
TOKYO OHKA KOGYO CO LTD2 citations61
US7968269B2Jun 28, 2011
Positive resist composition for immersion exposure and method of forming resist pattern
TOKYO OHKA KOGYO CO LTD0 citations39