Inventor
KIM YOUNG-CHEON
KR7 patents
⚠️ This page may combine multiple inventors who share the name “KIM YOUNG-CHEON”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SAMSUNG ELECTRONICS CO LTD
4 patentsUS7504725B2Mar 17, 2009
Semiconductor memory device having low-resistance tungsten line and method of manufacturing the semiconductor memory device
SAMSUNG ELECTRONICS CO LTD30 citations92
US6623798B2Sep 23, 2003
Chemical vapor deposition method for depositing silicide and apparatus for performing the same
SAMSUNG ELECTRONICS CO LTD13 citations80
US6797575B2Sep 28, 2004
Method for forming a polycide structure in a semiconductor device
SAMSUNG ELECTRONICS CO LTD8 citations72
US6451691B2Sep 17, 2002
Methods of manufacturing a metal pattern of a semiconductor device which include forming nitride layer at exposed sidewalls of Ti layer of the pattern
SAMSUNG ELECTRONICS CO LTD7 citations72