Inventor
SHIN JU-CHEOL
KR7 patents
Patents
7 patentsUS6623798B2Sep 23, 2003
Chemical vapor deposition method for depositing silicide and apparatus for performing the same
SAMSUNG ELECTRONICS CO LTD13 citations80
US6905960B2Jun 14, 2005
Method of forming a contact in a semiconductor device
SAMSUNG ELECTRONICS CO LTD9 citations72
US6797575B2Sep 28, 2004
Method for forming a polycide structure in a semiconductor device
SAMSUNG ELECTRONICS CO LTD8 citations72
US6670268B2Dec 30, 2003
Metal interconnection with low resistance in a semiconductor device and a method of forming the same
SAMSUNG ELECTRONICS CO LTD6 citations61
US7135407B2Nov 14, 2006
Method of manufacturing a semiconductor device
SAMSUNG ELECTRONICS CO LTD3 citations60
US6774029B2Aug 10, 2004
Method for forming a conductive film and a conductive pattern of a semiconductor device
SAMSUNG ELECTRONICS CO LTD4 citations60
US7122468B2Oct 17, 2006
Methods of fabricating integrated circuit conductive contact structures including grooves
SAMSUNG ELECTRONICS CO LTD0 citations39