Inventor
KARL JUERGEN
DE2 patents
Patents
2 patentsUS6484307B2Nov 19, 2002
Method for fabricating and checking structures of electronic circuits in a semiconductor substrate
INFINEON TECHNOLOGIES AG3 citations57
US7252913B2Aug 7, 2007
Method for projection of a circuit pattern, which is arranged on a mask, onto a semiconductor wafer
INFINEON TECHNOLOGIES AG4 citations54