Inventor
CHEN DENGPENG
SG4 patents
⚠️ This page may combine multiple inventors who share the name “CHEN DENGPENG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
KLA TENCOR CORP
3 patentsUS11441893B2Sep 13, 2022
Multi-spot analysis system with multiple optical probes
KLA TENCOR CORP0 citations48
US10236222B2Mar 19, 2019
System and method for measuring substrate and film thickness distribution
KLA TENCOR CORP0 citations48
US9651359B2May 16, 2017
Dual wavelength dual interferometer with combiner-splitter
KLA TENCOR CORP1 citations47