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Inventor
KOTAKE WATARU
JP
3 patents
⚠️ This page may combine multiple inventors who share the name “KOTAKE WATARU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOMITA SHINICHI
1 patent
US9287083B2
Mar 15, 2016
Charged particle beam device
TOMITA SHINICHI
3 citations
64
HATANO MICHIO
1 patent
US8097848B2
Jan 17, 2012
Scanning electron microscope
HATANO MICHIO
2 citations
55
HITACHI HIGH TECH CORP
1 patent
US9012842B2
Apr 21, 2015
Charged particle beam device and inclined observation image display method
HITACHI HIGH TECH CORP
1 citations
49