P

Inventor

ADAMS JOHN A

US49 patents
⚠️ This page may combine multiple inventors who share the name “ADAMS JOHN A”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

SPEEDFAM IPEC CORP

12 patents
US6143155ANov 7, 2000

Method for simultaneous non-contact electrochemical plating and planarizing of semiconductor wafers using a bipiolar electrode assembly

SPEEDFAM IPEC CORP265 citations98
US6676482B2Jan 13, 2004

Learning method and apparatus for predictive determination of endpoint during chemical mechanical planarization using sparse sampling

SPEEDFAM IPEC CORP83 citations96
US6361646B1Mar 26, 2002

Method and apparatus for endpoint detection for chemical mechanical polishing

SPEEDFAM IPEC CORP185 citations96
US6106662AAug 22, 2000

Method and apparatus for endpoint detection for chemical mechanical polishing

SPEEDFAM IPEC CORP197 citations96
US6515493B1Feb 4, 2003

Method and apparatus for in-situ endpoint detection using electrical sensors

SPEEDFAM IPEC CORP56 citations95
US6056632AMay 2, 2000

Semiconductor wafer polishing apparatus with a variable polishing force wafer carrier head

SPEEDFAM IPEC CORP202 citations94
US6491569B2Dec 10, 2002

Method and apparatus for using optical reflection data to obtain a continuous predictive signal during CMP

SPEEDFAM IPEC CORP55 citations93
US6549279B2Apr 15, 2003

Method and apparatus for optical endpoint calibration in CMP

SPEEDFAM IPEC CORP37 citations92
US6500055B1Dec 31, 2002

Oscillating orbital polisher and method

SPEEDFAM IPEC CORP21 citations92
US6184139B1Feb 6, 2001

Oscillating orbital polisher and method

SPEEDFAM IPEC CORP33 citations92
US6395130B1May 28, 2002

Hydrophobic optical endpoint light pipes for chemical mechanical polishing

SPEEDFAM IPEC CORP51 citations91
US6387807B1May 14, 2002

Method for selective removal of copper

SPEEDFAM IPEC CORP34 citations87

FOUR PI SYSTEMS CORP

6 patents

INTEGRATED PROCESS EQUIPMENT C

5 patents

HEWLETT PACKARD CO

4 patents

JMAR TECHNOLOGIES INC

3 patents

ADAMS JOHN A

3 patents

ROBODESIGN INTERNATIONAL INC

2 patents

GANZ BRIAN L

2 patents

FORHEALTH TECHNOLOGIES INC

1 patent

NOVATEL WIRELESS INC

1 patent

IPEC CLEAN INC

1 patent

JMAR RES INC

1 patent

HOFFMAN JOHN

1 patent

ATHENS CORP

1 patent

EMC CORP

1 patent

JMAR LLC

1 patent

RIGAKU AUTOMATION INC

1 patent

EMC IP HOLDING CO LLC

1 patent

ROBO DESIGN INTERNATIONAL INC

1 patent

THORNTON STEVEN D

1 patent