Inventor
HUH GUN
KR2 patents
Patents
2 patentsUS8762901B2Jun 24, 2014
Method for process proximity correction
SAMSUNG ELECTRONICS CO LTD5 citations64
US11989873B2May 21, 2024
Stochastic contour prediction system, method of providing the stochastic contour prediction system, and method of providing EUV mask using the stochastic contour prediction system
SAMSUNG ELECTRONICS CO LTD0 citations46