Inventor

GWINN MATTHEW C

US18 patents

⚠️ This page may combine multiple inventors who share the name “GWINN MATTHEW C”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

GWINN MATTHEW C

TEL EPION INC

Method and apparatus for controlling a gas cluster ion beam formed from a gas mixture

Method and apparatus for scanning a workpiece through an ion beam

Apparatus and method for reducing particulate contamination in gas cluster ion beam processing equipment

Molecular beam enhanced GCIB treatment

Low contamination scanner for GCIB system

Process gas enhancement for beam treatment of a substrate

Compensated location specific processing apparatus and method

Compensated location specific processing apparatus and method

GCIB nozzle assembly

EPION CORP

Method and apparatus for improved processing with a gas-cluster ion beam

Gas cluster ion beam smoother apparatus

Detector and method for cluster ion beam diagnostics

Method and apparatus for improved beam stability in high current gas-cluster ion beam processing system

TABAT MARTIN D

Multiple nozzle gas cluster ion beam processing system and method of operating

Multiple nozzle gas cluster ion beam system

Method of irradiating substrate with gas cluster ion beam formed from multiple gas nozzles

EATON CORP

Method of implanting low doses of ions into a substrate

GWINN MATTHEW C

Scanner for GCIB system