Inventor
LEITH ALLEN J
US5 patents
⚠️ This page may combine multiple inventors who share the name “LEITH ALLEN J”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TEL EPION INC
4 patentsUS9735019B2Aug 15, 2017
Process gas enhancement for beam treatment of a substrate
TEL EPION INC1 citations50
US10861674B2Dec 8, 2020
Compensated location specific processing apparatus and method
TEL EPION INC0 citations49
US10497540B2Dec 3, 2019
Compensated location specific processing apparatus and method
TEL EPION INC0 citations49
US10256095B2Apr 9, 2019
Method for high throughput using beam scan size and beam position in gas cluster ion beam processing system
TEL EPION INC0 citations39