Inventor
JEMBULINGAM SOUNDARRAJAN
IN5 patents
Patents
5 patentsUS10781518B2Sep 22, 2020
Gas cooled electrostatic chuck (ESC) having a gas channel formed therein and coupled to a gas box on both ends of the gas channel
APPLIED MATERIALS INC3 citations70
US11508563B1Nov 22, 2022
Methods and apparatus for processing a substrate using improved shield configurations
APPLIED MATERIALS INC2 citations69
US11251067B2Feb 15, 2022
Pedestal lift for semiconductor processing chambers
APPLIED MATERIALS INC2 citations68
US11621152B2Apr 4, 2023
Methods and apparatus for processing a substrate using improved shield configurations
APPLIED MATERIALS INC0 citations59
US11056372B2Jul 6, 2021
Low temperature biasable substrate support
APPLIED MATERIALS INC0 citations58