Inventor
RENKENS MICHAEL JOZEFA MATHIJS
NL5 patents
Patents
5 patentsUS6740891B2May 25, 2004
Lithographic apparatus, device manufacturing method, and device manufactured thereby
ASML NETHERLANDS BV26 citations89
US7049592B2May 23, 2006
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV10 citations71
US6597431B2Jul 22, 2003
Lithographic projection apparatus and device manufacturing method
ASML NETHERLANDS BV4 citations60
US7084953B2Aug 1, 2006
Lithographic apparatus, device manufacturing method and device manufactured thereby
ASML NETHERLANDS BV2 citations59
US7397040B2Jul 8, 2008
Lithographic apparatus, device manufacturing method, and device manufactured thereby
ASML NETHERLANDS BV0 citations48