Inventor
MOORS JOHANNES HUBERTUS JOSEPH
NL31 patents
⚠️ This page may combine multiple inventors who share the name “MOORS JOHANNES HUBERTUS JOSEPH”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML NETHERLANDS BV
30 patentsUS7405417B2Jul 29, 2008
Lithographic apparatus having a monitoring device for detecting contamination
ASML NETHERLANDS BV62 citations96
US6781673B2Aug 24, 2004
Mask handling apparatus, lithographic projection apparatus, device manufacturing method and device manufactured thereby
ASML NETHERLANDS BV56 citations94
US7414700B2Aug 19, 2008
Method for the removal of deposition on an optical element, method for the protection of an optical element, device manufacturing method, apparatus including an optical element, and lithographic apparatus
ASML NETHERLANDS BV16 citations92
US7355672B2Apr 8, 2008
Method for the removal of deposition on an optical element, method for the protection of an optical element, device manufacturing method, apparatus including an optical element, and lithographic apparatus
ASML NETHERLANDS BV16 citations92
US6741329B2May 25, 2004
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV30 citations92
US7251012B2Jul 31, 2007
Lithographic apparatus having a debris-mitigation system, a source for producing EUV radiation having a debris mitigation system and a method for mitigating debris
ASML NETHERLANDS BV25 citations91
US7088431B2Aug 8, 2006
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV23 citations91
US7372623B2May 13, 2008
Multi-layer spectral purity filter, lithographic apparatus including such a spectral purity filter, device manufacturing method, and device manufactured thereby
ASML NETHERLANDS BV19 citations89
US6940587B2Sep 6, 2005
Lithographic apparatus and a measurement system
ASML NETHERLANDS BV17 citations84
US6879374B2Apr 12, 2005
Device manufacturing method, device manufactured thereby and a mask for use in the method
ASML NETHERLANDS BV13 citations84
US7639418B2Dec 29, 2009
Multi-layer spectral purity filter, lithographic apparatus including such a spectral purity filter, device manufacturing method, and device manufactured thereby
ASML NETHERLANDS BV13 citations80
US7167232B2Jan 23, 2007
Lithographic apparatus and radiation source comprising a debris-mitigation system and method for mitigating debris particles in a lithographic apparatus
ASML NETHERLANDS BV15 citations80
US7262423B2Aug 28, 2007
Radiation system and lithographic apparatus
ASML NETHERLANDS BV8 citations74
US7193229B2Mar 20, 2007
Lithographic apparatus, illumination system and method for mitigating debris particles
ASML NETHERLANDS BV8 citations74
US7075620B2Jul 11, 2006
Lithographic apparatus, device manufacturing method, and device manufactured thereby
ASML NETHERLANDS BV5 citations74
US7095479B2Aug 22, 2006
Lithographic apparatus, device manufacturing method and device manufactured thereby
ASML NETHERLANDS BV9 citations72
US7041989B1May 9, 2006
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV9 citations72
US7098994B2Aug 29, 2006
Lithographic apparatus, device manufacturing method, and device manufactured thereby
ASML NETHERLANDS BV7 citations69
US7245357B2Jul 17, 2007
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV8 citations68
US6980281B2Dec 27, 2005
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV6 citations62
US7202934B2Apr 10, 2007
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV4 citations61
US7508487B2Mar 24, 2009
Lithographic apparatus, device manufacturing method, and device manufactured thereby
ASML NETHERLANDS BV5 citations60
US7279690B2Oct 9, 2007
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV2 citations60
US6597431B2Jul 22, 2003
Lithographic projection apparatus and device manufacturing method
ASML NETHERLANDS BV4 citations60
US7629594B2Dec 8, 2009
Lithographic apparatus, and device manufacturing method
ASML NETHERLANDS BV2 citations59
US7361911B2Apr 22, 2008
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV2 citations59
US7151589B2Dec 19, 2006
Lithographic apparatus and patterning device transport
ASML NETHERLANDS BV3 citations59
US7369216B2May 6, 2008
Lithographic system, method for adapting transmission characteristics of an optical pathway within a lithographic system, semiconductor device, method of manufacturing a reflective element for use in a lithographic system, and reflective element manufactured thereby
ASML NETHERLANDS BV1 citations52
US7092072B2Aug 15, 2006
Calibration apparatus and method of calibrating a radiation sensor in a lithographic apparatus
ASML NETHERLANDS BV1 citations51
US7248340B2Jul 24, 2007
Lithographic apparatus and patterning device transport
ASML NETHERLANDS BV0 citations48