Inventor
VAN DIJSSELDONK ANTONIUS JOHAN
NL18 patents
⚠️ This page may combine multiple inventors who share the name “VAN DIJSSELDONK ANTONIUS JOHAN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML NETHERLANDS BV
17 patentsUS6927004B2Aug 9, 2005
Mask for use in lithography, method of making a mask, lithographic apparatus, and device manufacturing method
ASML NETHERLANDS BV100 citations97
US6737662B2May 18, 2004
Lithographic apparatus, device manufacturing method, device manufactured thereby, control system, computer program, and computer program product
ASML NETHERLANDS BV109 citations96
US7148952B2Dec 12, 2006
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV24 citations89
US6765712B2Jul 20, 2004
Lithographic apparatus, device manufacturing method, and device manufactured thereby
ASML NETHERLANDS BV30 citations88
US6940587B2Sep 6, 2005
Lithographic apparatus and a measurement system
ASML NETHERLANDS BV17 citations84
US7151594B2Dec 19, 2006
Test pattern, inspection method, and device manufacturing method
ASML NETHERLANDS BV6 citations74
US7116399B2Oct 3, 2006
Lithographic apparatus, device manufacturing method, and device manufactured thereby
ASML NETHERLANDS BV8 citations73
US7253880B2Aug 7, 2007
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV9 citations72
US7145640B2Dec 5, 2006
Lithographic apparatus, device manufacturing method and variable attenuator
ASML NETHERLANDS BV8 citations72
US7312860B2Dec 25, 2007
Test pattern, inspection method, and device manufacturing method
ASML NETHERLANDS BV4 citations63
US7463336B2Dec 9, 2008
Device manufacturing method and apparatus with applied electric field
ASML NETHERLANDS BV3 citations62
US7136149B2Nov 14, 2006
Lithographic apparatus with autofocus system
ASML NETHERLANDS BV2 citations62
US7023524B2Apr 4, 2006
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV5 citations62
US6987275B2Jan 17, 2006
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV6 citations62
US6967756B2Nov 22, 2005
Lithographic apparatus device manufacturing method and device manufactured thereby
ASML NETHERLANDS BV4 citations62
US6597431B2Jul 22, 2003
Lithographic projection apparatus and device manufacturing method
ASML NETHERLANDS BV4 citations60
US7307262B2Dec 11, 2007
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV6 citations54