Inventor
KIYOTOMI AKIKO
JP13 patents
⚠️ This page may combine multiple inventors who share the name “KIYOTOMI AKIKO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
12 patentsUS11823922B2Nov 21, 2023
Substrate inspection apparatus, substrate processing apparatus, substrate inspection method, and computer-readable recording medium
TOKYO ELECTRON LTD2 citations72
US11676844B2Jun 13, 2023
Coating film forming apparatus and adjustment method therefor
TOKYO ELECTRON LTD4 citations70
US12314023B2May 27, 2025
Treatment condition setting method, storage medium, and substrate treatment system
TOKYO ELECTRON LTD0 citations62
US11726438B2Aug 15, 2023
Treatment condition setting method, storage medium, and substrate treatment system
TOKYO ELECTRON LTD1 citations62
US11609502B2Mar 21, 2023
Substrate inspection apparatus, substrate processing apparatus, substrate inspection method, and computer-readable recording medium
TOKYO ELECTRON LTD1 citations61
US11467496B2Oct 11, 2022
Substrate processing apparatus, method of adjusting parameters of coating module, and storage medium
TOKYO ELECTRON LTD0 citations60
US10901318B2Jan 26, 2021
Substrate processing apparatus, method of adjusting parameters of coating module, and storage medium
TOKYO ELECTRON LTD0 citations60
US10670966B2Jun 2, 2020
Substrate processing apparatus, method of adjusting parameters of coating module, and storage medium
TOKYO ELECTRON LTD1 citations60
US11669955B2Jun 6, 2023
Substrate defect inspection method, storage medium, and substrate defect inspection apparatus
TOKYO ELECTRON LTD0 citations50
US12538743B2Jan 27, 2026
Warpage amount estimation apparatus and warpage amount estimation method
TOKYO ELECTRON LTD0 citations49
US11268912B2Mar 8, 2022
Substrate inspection method and substrate inspection apparatus
TOKYO ELECTRON LTD0 citations49
US11378388B2Jul 5, 2022
Substrate inspection method, substrate inspection apparatus and recording medium
TOKYO ELECTRON LTD0 citations48