Inventor
FUKUCHI KOUSUKE
JP13 patents
Patents
13 patentsUS11437289B2Sep 6, 2022
Plasma processing apparatus and plasma processing method
HITACHI HIGH TECH CORP4 citations71
US10020233B2Jul 10, 2018
Plasma processing apparatus and plasma processing method
HITACHI HIGH TECH CORP2 citations71
US9741629B2Aug 22, 2017
Plasma processing apparatus and plasma processing method
HITACHI HIGH TECH CORP3 citations71
US11605530B2Mar 14, 2023
Plasma processing apparatus, data processing apparatus and data processing method
HITACHI HIGH TECH CORP0 citations62
US11308182B2Apr 19, 2022
Data processing method, data processing apparatus and processing apparatus
HITACHI HIGH TECH CORP0 citations62
US12131964B2Oct 29, 2024
Plasma processing apparatus and plasma processing method
HITACHI HIGH TECH CORP0 citations61
US10783220B2Sep 22, 2020
Data processing method, data processing apparatus and processing apparatus
HITACHI HIGH TECH CORP0 citations51
US10615010B2Apr 7, 2020
Plasma processing apparatus, data processing apparatus and data processing method
HITACHI HIGH TECH CORP0 citations51
US10073818B2Sep 11, 2018
Data processing method, data processing apparatus and processing apparatus
HITACHI HIGH TECH CORP0 citations51
US9865439B2Jan 9, 2018
Plasma processing apparatus
HITACHI HIGH TECH CORP1 citations51
US10872774B2Dec 22, 2020
Plasma processing apparatus and plasma processing method
HITACHI HIGH TECH CORP0 citations50
US9805940B2Oct 31, 2017
Plasma processing apparatus and plasma processing method
HITACHI HIGH TECH CORP0 citations41
US9190336B2Nov 17, 2015
Plasma processing apparatus and plasma processing method
HITACHI HIGH TECH CORP0 citations40