Inventor
OKAMOTO Tsubasa
JP6 patents
⚠️ This page may combine multiple inventors who share the name “OKAMOTO Tsubasa”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HITACHI HIGH TECH CORP
5 patentsUS11437289B2Sep 6, 2022
Plasma processing apparatus and plasma processing method
HITACHI HIGH TECH CORP4 citations71
US12131964B2Oct 29, 2024
Plasma processing apparatus and plasma processing method
HITACHI HIGH TECH CORP0 citations61
US12573601B2Mar 10, 2026
Plasma processing apparatus and plasma processing method
HITACHI HIGH TECH CORP0 citations50
US12051575B2Jul 30, 2024
Plasma processing apparatus and plasma processing method
HITACHI HIGH TECH CORP0 citations49
US11875978B2Jan 16, 2024
Plasma processing apparatus and plasma processing method
HITACHI HIGH TECH CORP0 citations47