Inventor
BREMENSDORFER ROLF
DE23 patents
⚠️ This page may combine multiple inventors who share the name “BREMENSDORFER ROLF”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
MATTSON TECH INC
14 patentsUS11610824B2Mar 21, 2023
Transmission-based temperature measurement of a workpiece in a thermal processing system
MATTSON TECH INC2 citations71
US10966286B2Mar 30, 2021
Nitrogen injection for ARC lamps
MATTSON TECH INC3 citations70
US12046489B2Jul 23, 2024
Workpiece processing apparatus with thermal processing systems
MATTSON TECH INC0 citations61
US11721539B2Aug 8, 2023
Arc lamp with forming gas for thermal processing systems
MATTSON TECH INC0 citations61
US12352306B2Jul 8, 2025
Workpiece support for a thermal processing system
MATTSON TECH INC0 citations59
US12120780B2Oct 15, 2024
Nitrogen injection for arc lamps
MATTSON TECH INC0 citations59
US12080568B2Sep 3, 2024
Support plate for localized heating in thermal processing systems
MATTSON TECH INC0 citations55
US11521868B2Dec 6, 2022
Support plate for localized heating in thermal processing systems
MATTSON TECH INC0 citations55
US12399064B2Aug 26, 2025
Systems and methods for thermal processing and temperature measurement of a workpiece at low temperatures
MATTSON TECH INC0 citations51
US11812523B2Nov 7, 2023
Thermal processing system with transmission switch plate
MATTSON TECH INC0 citations51
US12535273B2Jan 27, 2026
Workpiece processing apparatus with thermal processing systems
MATTSON TECH INC0 citations48
US12442078B2Oct 14, 2025
Workpiece processing apparatus with gas showerhead assembly
MATTSON TECH INC0 citations48
US11193178B2Dec 7, 2021
Thermal processing of closed shape workpieces
MATTSON TECH INC0 citations47
US12176241B2Dec 24, 2024
Support structure for thermal processing systems
MATTSON TECH INC0 citations46
BEIJING E TOWN SEMICONDUCTOR TECH CO LTD
8 patentsUS11955388B2Apr 9, 2024
Transmission-based temperature measurement of a workpiece in a thermal processing system
BEIJING E TOWN SEMICONDUCTOR TECH CO LTD1 citations71
US12068177B2Aug 20, 2024
Rapid thermal processing system with cooling system
BEIJING E TOWN SEMICONDUCTOR TECH CO LTD2 citations68
US12119216B2Oct 15, 2024
Arc lamp with forming gas for thermal processing systems
BEIJING E TOWN SEMICONDUCTOR TECH CO LTD0 citations61
US12412758B2Sep 9, 2025
Workpiece processing apparatus with thermal processing systems
BEIJING E TOWN SEMICONDUCTOR TECH CO LTD0 citations60
US12400916B2Aug 26, 2025
Transmission-based temperature measurement of a workpiece in a thermal processing system
BEIJING E TOWN SEMICONDUCTOR TECH CO LTD0 citations60
US12183558B2Dec 31, 2024
Workpiece processing apparatus with thermal processing systems
BEIJING E TOWN SEMICONDUCTOR TECH CO LTD0 citations59
US11837447B2Dec 5, 2023
Workpiece processing apparatus with plasma and thermal processing systems
BEIJING E TOWN SEMICONDUCTOR TECH CO LTD0 citations59
US12362194B2Jul 15, 2025
Rapid thermal processing system with cooling system
BEIJING E TOWN SEMICONDUCTOR TECH CO LTD0 citations47