Inventor
GULABAL VINAYAKARADDY
IN4 patents
Patents
4 patentsUS12203168B2Jan 21, 2025
Metal deposition
LAM RES CORP1 citations60
US12437974B2Oct 7, 2025
Solenoid bank with standby solenoid valves for controlling pneumatic valves of a substrate processing system
LAM RES CORP0 citations47
US11725285B2Aug 15, 2023
Preventing deposition on pedestal in semiconductor substrate processing
LAM RES CORP0 citations42
US12162117B2Dec 10, 2024
Pedestal polishing apparatus
LAM RES CORP0 citations38