Inventor
KIM DAE SIG
KR8 patents
Patents
8 patentsUS6752869B2Jun 22, 2004
Atomic layer deposition using organometallic complex with β-diketone ligand
SAMSUNG ELECTRONICS CO LTD27 citations92
US6669990B2Dec 30, 2003
Atomic layer deposition method using a novel group IV metal precursor
SAMSUNG ELECTRONICS CO LTD20 citations92
US6424800B1Jul 23, 2002
Bubbler
SAMSUNG ELECTRONICS CO LTD42 citations91
US6333066B1Dec 25, 2001
Method for forming PZT thin film using seed layer
SAMSUNG ELECTRONICS CO LTD30 citations91
US5603169AFeb 18, 1997
Bubbler for solid metal-organic percursors
SAMSUNG ELECTRONICS CO LTD42 citations91
US6080593AJun 27, 2000
Method of manufacturing ferroelectric memory
SAMSUNG ELECTRONICS CO LTD13 citations72
US6689427B2Feb 10, 2004
Group IV metal precursors and a method of chemical vapor deposition using the same
SAMSUNG ELECTRONICS CO LTD8 citations68
US7709377B2May 4, 2010
Thin film including multi components and method of forming the same
SAMSUNG ELECTRONICS CO LTD1 citations52