Inventor
SFERLAZZO PIERO
US28 patents
⚠️ This page may combine multiple inventors who share the name “SFERLAZZO PIERO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SFERLAZZO PIERO
5 patentsUS8092599B2Jan 10, 2012
Movable injectors in rotating disc gas reactors
SFERLAZZO PIERO29 citations91
US8225527B2Jul 24, 2012
Cooling apparatus for a web deposition system
SFERLAZZO PIERO5 citations59
US8865259B2Oct 21, 2014
Method and system for inline chemical vapor deposition
SFERLAZZO PIERO1 citations42
US8986451B2Mar 24, 2015
Linear batch chemical vapor deposition system
SFERLAZZO PIERO0 citations41
US9169562B2Oct 27, 2015
Parallel batch chemical vapor deposition system
SFERLAZZO PIERO0 citations39
EATON CORP
4 patentsUS5497006AMar 5, 1996
Ion generating source for use in an ion implanter
EATON CORP167 citations97
US5811823ASep 22, 1998
Control mechanisms for dosimetry control in ion implantation systems
EATON CORP50 citations92
US5523652AJun 4, 1996
Microwave energized ion source for ion implantation
EATON CORP53 citations90
US5113074AMay 12, 1992
Ion beam potential detection probe
EATON CORP17 citations74
NEXX SYSTEMS PACKAGING LLC
4 patentsUS6328858B1Dec 11, 2001
Multi-layer sputter deposition apparatus
NEXX SYSTEMS PACKAGING LLC49 citations91
US6682288B2Jan 27, 2004
Substrate processing pallet and related substrate processing method and machine
NEXX SYSTEMS PACKAGING LLC18 citations82
US6530733B2Mar 11, 2003
Substrate processing pallet and related substrate processing method and machine
NEXX SYSTEMS PACKAGING LLC17 citations82
US6821912B2Nov 23, 2004
Substrate processing pallet and related substrate processing method and machine
NEXX SYSTEMS PACKAGING LLC9 citations71
VARIAN SEMICONDUCTOR EQUIPMENT ASS INC
4 patentsUS9706634B2Jul 11, 2017
Apparatus and techniques to treat substrates using directional plasma and reactive gas
VARIAN SEMICONDUCTOR EQUIPMENT ASS INC12 citations82
US10004133B2Jun 19, 2018
Apparatus and techniques to treat substrates using directional plasma and reactive gas
VARIAN SEMICONDUCTOR EQUIPMENT ASS INC5 citations71
US11631588B2Apr 18, 2023
Method and apparatus for non line-of-sight doping
VARIAN SEMICONDUCTOR EQUIPMENT ASS INC0 citations61
US10541137B2Jan 21, 2020
Method and apparatus for non line-of-sight doping
VARIAN SEMICONDUCTOR EQUIPMENT ASS INC0 citations50
UNAXIS USA INC
3 patentsUS6495010B2Dec 17, 2002
Differentially-pumped material processing system
UNAXIS USA INC34 citations92
US6669824B2Dec 30, 2003
Dual-scan thin film processing system
UNAXIS USA INC17 citations84
US6718076B2Apr 6, 2004
Acousto-optic tunable filter with segmented acousto-optic interaction region
UNAXIS USA INC14 citations78