Inventor
HONMA ICHIROU
JP4 patents
Patents
4 patentsUS5372962ADec 13, 1994
Method of making a semiconductor integrated circuit device having a capacitor with a porous surface of an electrode
NEC CORP106 citations95
US5661052AAug 26, 1997
Method of fabricating semiconductor device having low-resistance gate electrode and diffusion layers
NEC CORP32 citations92
US5796484AAug 18, 1998
System for detecting unevenness degree of surface of semiconductor device
NEC CORP34 citations90
US5850288ADec 15, 1998
Method for manufacturing a semiconductor device
NEC CORP10 citations71