Inventor
WU FREDERICK
US8 patents
⚠️ This page may combine multiple inventors who share the name “WU FREDERICK”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
4 patentsUS6242347B1Jun 5, 2001
Method for cleaning a process chamber
APPLIED MATERIALS INC39 citations91
US6221174B1Apr 24, 2001
Method of performing titanium/titanium nitride integration
APPLIED MATERIALS INC15 citations83
US6548402B2Apr 15, 2003
Method of depositing a thick titanium nitride film
APPLIED MATERIALS INC16 citations82
US6482746B2Nov 19, 2002
Computer readable medium for controlling a method of cleaning a process chamber
APPLIED MATERIALS INC4 citations59