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Inventor
WU KENNETH C
US
3 patents
⚠️ This page may combine multiple inventors who share the name “WU KENNETH C”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
MASSACHUSETTS INST TECHNOLOGY
2 patents
US6521041B2
Feb 18, 2003
Etch stop layer system
MASSACHUSETTS INST TECHNOLOGY
135 citations
96
US6689211B1
Feb 10, 2004
Etch stop layer system
MASSACHUSETTS INST TECHNOLOGY
86 citations
94
DRAPER LAB CHARLES S
1 patent
US7227176B2
Jun 5, 2007
Etch stop layer system
DRAPER LAB CHARLES S
29 citations
92